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Chapitre d'ouvrage
Raman-in-SEM studies of inorganic materials
Abstract : SEM-EDS and micro-Raman spectroscopy have been combined for material characterization in several recent studies. Switching from one to the other is frequently considered as a problem that cannot be solved using specific solutions. Although both techniques have followed a parallel but very different evolution since their introduction in the early 1930s, the concept of Raman-in-SEM first began in the 1980s and the first commercial systems were marketed in the early 2000s. The two main systems and techniques that have been developed and marketed by three manufacturers are presented and described in this chapter. An evaluation of their advantages and limitations is proposed. A metrological study is then proposed for one of these systems, based on the 'on-axis' technique using a curved mirror placed under the SEM pole piece. This study allows a discussion of the performance and limitations of Raman spectroscopy when performed in a SEM
https://hal-brgm.archives-ouvertes.fr/hal-01023680
Contributeur : Guillaume Wille <>
Soumis le : mardi 15 juillet 2014 - 10:17:09
Dernière modification le : vendredi 19 février 2021 - 16:22:02
Contributeur : Guillaume Wille <>
Soumis le : mardi 15 juillet 2014 - 10:17:09
Dernière modification le : vendredi 19 février 2021 - 16:22:02
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